Huang W W, Wang X Y, Meng Y X, Li L L, Zhang X Q, Ren M J, Zhu L M. 2024. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey. Int. J. Extrem. Manuf. 6 062007. DOI: 10.1088/2631-7990/ad8117
Citation:
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Huang W W, Wang X Y, Meng Y X, Li L L, Zhang X Q, Ren M J, Zhu L M. 2024. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey. Int. J. Extrem. Manuf. 6 062007. DOI: 10.1088/2631-7990/ad8117
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Huang W W, Wang X Y, Meng Y X, Li L L, Zhang X Q, Ren M J, Zhu L M. 2024. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey. Int. J. Extrem. Manuf. 6 062007. DOI: 10.1088/2631-7990/ad8117
Citation:
|
Huang W W, Wang X Y, Meng Y X, Li L L, Zhang X Q, Ren M J, Zhu L M. 2024. Design, modeling and control of high-bandwidth nano-positioning stages for ultra-precise measurement and manufacturing: a survey. Int. J. Extrem. Manuf. 6 062007. DOI: 10.1088/2631-7990/ad8117
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