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Yu Z B, Zhang Z Y, Zeng Z N, Fan C, Gu Y, Shi C J, Zhou H X, Meng F N, Feng J Y. 2025. Atomic surface of diamond induced by novel green photocatalytic chemical mechanical polishing with high material removal rate. Int. J. Extrem. Manuf. 7 025102. DOI: 10.1088/2631-7990/ad97f7
Citation: Yu Z B, Zhang Z Y, Zeng Z N, Fan C, Gu Y, Shi C J, Zhou H X, Meng F N, Feng J Y. 2025. Atomic surface of diamond induced by novel green photocatalytic chemical mechanical polishing with high material removal rate. Int. J. Extrem. Manuf. 7 025102. DOI: 10.1088/2631-7990/ad97f7
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新型高材料去除率绿色光催化化学机械抛光诱导制备原子级金刚石表面

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