通过选择性表面活化增强非氧化物界面Co/SiO2混合键合

doi:10.1088/2631-7990/ada834

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Qi X Y, Zhou S C, Ma Y, Suga T, Wang C X. 2025. Boosting non-oxide interfacial Co/SiO2 hybrid bonding by selective surface activation. Int. J. Extrem. Manuf. 7 035101. DOI: 10.1088/2631-7990/ada834

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Qi X Y, Zhou S C, Ma Y, Suga T, Wang C X. 2025. Boosting non-oxide interfacial Co/SiO2 hybrid bonding by selective surface activation. Int. J. Extrem. Manuf. 7 035101. DOI: 10.1088/2631-7990/ada834

Citation:

Qi X Y, Zhou S C, Ma Y, Suga T, Wang C X. 2025. Boosting non-oxide interfacial Co/SiO2 hybrid bonding by selective surface activation. Int. J. Extrem. Manuf. 7 035101. DOI: 10.1088/2631-7990/ada834

通过选择性表面活化增强非氧化物界面Co/SiO₂混合键合

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通过选择性表面活化增强非氧化物界面Co/SiO2混合键合

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通过选择性表面活化增强非氧化物界面Co/SiO₂混合键合