<span style="text-wrap-mode: wrap;">突破5纳米制造瓶颈：下一代器件的规模化可重复制备新路径</span>

doi:10.1088/2631-7990/ae2578

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Chen L J et al. 2026. Scalable and reproducible sub-5 nm manufacturing for next-generation devices. Int. J. Extrem. Manuf. 8 022010.. DOI: 10.1088/2631-7990/ae2578

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Chen L J et al. 2026. Scalable and reproducible sub-5 nm manufacturing for next-generation devices. Int. J. Extrem. Manuf. 8 022010.. DOI: 10.1088/2631-7990/ae2578

Citation:

Chen L J et al. 2026. Scalable and reproducible sub-5 nm manufacturing for next-generation devices. Int. J. Extrem. Manuf. 8 022010.. DOI: 10.1088/2631-7990/ae2578

突破5纳米制造瓶颈：下一代器件的规模化可重复制备新路径

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Chen L J et al. 2026. Scalable and reproducible sub-5 nm manufacturing for next-generation devices. Int. J. Extrem. Manuf. 8 022010.

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突破5纳米制造瓶颈：下一代器件的规模化可重复制备新路径

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