Guo J, Shi X L, Song C P, Niu L, Cui H L et al. Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy. Int. J. Extrem. Manuf. 3, 025103(2021).. DOI: 10.1088/2631-7990/abefb8
引用本文: Guo J, Shi X L, Song C P, Niu L, Cui H L et al. Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy. Int. J. Extrem. Manuf. 3, 025103(2021).. DOI: 10.1088/2631-7990/abefb8
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Guo J, Shi X L, Song C P, Niu L, Cui H L et al. Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy. Int. J. Extrem. Manuf. 3, 025103(2021).. doi: 10.1088/2631-7990/abefb8
Citation: Guo J, Shi X L, Song C P, Niu L, Cui H L et al. Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy. Int. J. Extrem. Manuf. 3, 025103(2021).. doi: 10.1088/2631-7990/abefb8
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W-Ni-Fe合金化学机械抛光的理论与实验研究

  • 摘要: 为了提高模具和精密仪器零件的表面质量，需要对钨合金进行精加工。然而，由于两相微结构的性能差异导致晶界台阶的形成，很难获得高质量表面。本文对钨镍铁（W-Ni-Fe）合金的化学机械抛光进行了理论和实验研究，阐述了晶界台阶的形成机理，提出了晶界台阶的形成模型，揭示了机械和化学作用对表面粗糙度和材料去除率的影响。通过实验验证了模型的准确性，结果表明，通过平衡机械和化学作用可抑制晶界台阶的形成，从而获得高表面质量和高去除率。

     

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