Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures

doi:10.1088/2631-7990/ae23a0

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Lu T S, Deng F Y, Wei Y F, Zeng Z P, Li X H. 2026. Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures. Int. J. Extrem. Manuf. 8 025102.. DOI: 10.1088/2631-7990/ae23a0.

Citation:

Lu T S, Deng F Y, Wei Y F, Zeng Z P, Li X H. 2026. Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures. Int. J. Extrem. Manuf. 8 025102.. DOI: 10.1088/2631-7990/ae23a0.

Citation:

Lu T S, Deng F Y, Wei Y F, Zeng Z P, Li X H. 2026. Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures. Int. J. Extrem. Manuf. 8 025102.. DOI: 10.1088/2631-7990/ae23a0.

Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures

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Single-cycle contact-interference hybrid lithography for scalable fabrication of arrayed quadrant micro-polarizer structures

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